A bibliography of silicon molecular beam epitaxy.

This bibliography includes 601 references on silicon molecular beam epitaxy. The topic is defined broadly to include references on MBE of silicon and silicon compounds and MBE on silicon compounds and MBE on silicon substrates. Relevant references on surface physics and both solid phase and ion beam epitaxy are also included. References are listed by subject, permuted title and author. The authors employed a computer search of the INSPEC database, manual addition of publication lists of major contributors to the field and contents of MBE symposia.