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A Comparison of MOS Inversion Layer Charge and Capacitance Formulas

01 January 1986

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It is shown that a recent formula for inversion layer charge due It is shown that a recent formula for inversion layer charge due to Lewyn and Meindl is less accurate than the charge sheet expression at low carrier densities. This inaccuracy will affect MOSFET characteristics in subthreshold and pinch-off. Modifying their approach another formula is derived which does have higher accuracy. Curves are given showing the errors compared to a numerical integration.