A Comparison of Secondary Ionization and Resonance Ionization Mass Spectrometry

Resonance ionization mass spectrometry (RIMS) of neutral atoms sputtered from a solid is an analytical technique that has certain advantages over conventional secondary ion mass spectrometry (SIMS). These inherent advantages include: (1) Potential high sensitivity; (2) Rejection of mass interferences while retaining high sensitivity; (3) Reduced matrix effects. We have modified a commercial double- focusing, magnetic sector SIMS instrument for photoionization- based SIMS-style measurements.