A Field-Induced Charged-Device Model Simulator.

We introduce a new charged-device model simulator that is suitable for rapid, routine testing of semiconductor devices. The Field- Induced Charged Device Model (FCDM) simulator raises the device under test to a high voltage using the field of a non-contacting electrode, which avoids premature device stressing and permits a faster test cycle. The device discharges by direct contact with an electrode in air rather than through a vacuum relay. Waveforms measured for relay and air discharges are significantly different, but air discharges correspond more closely to the hazard that the CDM was designed to simulate. We examine the field charging mechanism, measure device thresholds, and analyze failure modes. The FCDM simulator provides a fast and inexpensive test that faithfully represents factory ESD hazards.