A Hybrid Resonance Ionization and Secondary Ionization Mass Spectrometer.
01 January 1990
Initial results from a hybrid Resonance Ionization and Secondary Ionization Mass Spectrometer (RIMS/SIMS) instrument are presented. RIMS is shown to reduce background interferences and improve interface resolution. The detection limit for Co in Si is determined to be 5 x 10 sup (17) cm sup (-3) for depth profiling applications. Advantages and disadvantages of both techniques are discussed.