A mass spectrometric study of AsH(3) and PH(3) gas sources for molecular beam epitaxy.
01 January 1986
The mass spectra of species resulting from the decomposition of AsH(3), PH(3) and a mixture of both have been studied with a modulated beam mass spectrometer. Two types of crackers, one that decomposes the hydrides at high pressure (~200 - 2000 Torr) and one that decomposes them on a Ta catalyst at low pressure (