A Modified Structure Zone Model to Describe the Morphological Evolution of ZnO Thin Films Deposited by Reactive Sputtering
01 January 2004
The morphological evolution of ZnO thin films deposited by magnetron sputtering is described by the use of a structure zone model. A modified Structure Zone Model was revealed, in which the boundaries between zones with specific features are shifted towards lower homologous temperatures (T/Tm) than in the classical models. The range of homologous temperatures for this study were in the range of 0.13