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    A New LPCVD Technique of Producing Borohoshosilicate Glass Films by Injection of Miscible Liquid Precursors

A New LPCVD Technique of Producing Borohoshosilicate Glass Films by Injection of Miscible Liquid Precursors

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This study introduces a new, simple and viable LPCVD technology based on the injection of miscible liquid precursors. The preparation of BPSG films from liquid mixtures of TEOS, TMB and TMP is used here as a prime example for implementing this concept.