a-plane MgxZn1-xO films deposited on r-sapphire and its surface acoustic wave characteristics
01 July 2007
Piezoelectric zinc oxide (ZnO) and its ternary alloy magnesium zinc oxide (MgxZn1-xO) films are deposited on r-plane (01 (1) over bar2) sapphire (Al2O3) Substrates using the hybrid deposition technology by combining metal-organic chemical vapor deposition (MOCVD) and sputtering. An ultra-thin ZnO buffer is first grown on r-Al2O3 by MOCVD technique, followed by a thick piezoelectric MgxZn1-xO (0