A silicon monolithic spiral transmission line balun with symmetrical design

In this work, a spiral transmission line balun has been fabricated on a high resistivity silicon substrate. The Marchand-type balun has been designed to have the same physical common ground points for the output transmission lines, which eliminates imbalance due to potential difference at the ground, Return loss is better than 17 dB in the frequency band of 1.6-1.1 GHz, especially 39 dB around 1.9 GHz, The amplitude imbalance is less than 0.3 dB throughout the bandwidth. The phase departure fi om 180 degrees is less than 2 degrees over the frequency range of 1.6-2.6 GHz. The balun is suitable for MMIC application.