A simple method for depositing thin films on the surface of transmission-electron-microscope specimens.
01 January 1984
Thin-film deposition on already-thinned transmission-electron- microscope (TEM) samples is generally difficult as these samples are often small and fragile. To overcome this difficulty, we have developed a new method for depositing thin films of practically any material onto TEM samples using an ion milling machine. This principle uses the fact that an ion milling machine can be used not only for removal but also for deposition of materials. Fine-grained thin films were found to grow on TEM samples by this method.