Skip to main content

A Simple, Versatile Interlock Scheme for a Diffusion Pumped UHV System.

01 January 1988

New Image

A simple yet versatile safety interlock circuit for a diffusion pumped UHV system is described. The interlock provides protection from all of the "normal" failures encountered in a research laboratory including: vacuum leaks, pump overheating, and loss of power, water, or liquid nitrogen. In addition, the procedure used to effectively pump such a system to pressures in the mid- to low- 10 sup -(11) Torr range is detailed.