A tester for the contact resistivity of self-aligned silicides.

Even as the process of self-aligned silicide gets more and more attention, a good tester that is fully compatible with the silicide process to monitor the silicide-to-Si specific contact resistivity has not been available. 

In this letter a tester is presented which utilizes MOSFET inversion channels to connect silicided source/drain contacts electrically together to satisfy the requirements of a Kelvin tester. This tester can be fabricated along with real devices and requires no additional processing steps. The results obtained accurately represent those of the actual devices.