Airborne Concentrations Of Organic Vapors And Their Surface Accumulations On Wafers During Processing In Clean Rooms

Sampling and analysis methods for characterizing vapor phase organic compounds in clean rooms have been developed. Airborne organic species are collected using three stage carbotrap collection tubes. Surface accumulation of organic species is evaluated using a static surface-mounted charcoal collection device. Analysis is by gas chromatography/mass spectrometry. From the data collected to date it is clear that both internal and external (outdoor) sources contribute to the flux of organic contaminants towards surfaces.