An Assessment of Methods to Measure Effective Channel Length of MOSFETs

There exists numerous methods for the measurement of the effective channel length of MOSFETs, but a best choice is not obvious. Most methods are based on the current-voltage characteristics at low drain bias above threshold. This paper outlines the essence of each of these methods, totaling eleven in number, and also examines the assumptions made. Criticisms and recommendations are also given such that the readers can have an overview of what is available and what is best suitable.