An automated process line for 5x PBS reticles.

This memorandum describes a flexible automated system for processing 5x PBS photomask reticles without human intervention which has been developed for the Murray Hill Mask Shop. The hardware described includes a six-axis robot on a twenty-four foot track, a custom linewidth measurement system with pattern recognition, a five position hotplate postbake station, and a one-step PBS developing station with a SMIF interface. The process control is accomplished with an interpreted high-level language designed for this system.