An evaluation of (100) sulfur doped InP for use as a first crystal in an X-ray double crystal diffractometer.

X-ray double crystal rocking curves for (100) oriented slices were studied. Although the dislocation density for a Gault process slice (2x10(3) cm(-2)) was significantly lower than that of a LEC slice (5x10(4) cm(-2)), both samples were found to have 12-14 arcsec linewidths in rocking curves made using an undoped (100) InP first crystal having a dislocation density of 2x10(5) cm(-2). These results indicate that the linewidth is not primarily dependent on the dislocation density.