An in-situ x-ray study of gold/barrier-metal interactions with InGaAsP/InP layers.
01 January 1984
The effectiveness of barrier metals such as Cr, Ni, Pd, Pt and Ti in gold metallization contacts on InGaAsP/InP was studied. Using a temperature dependent in situ x-ray technique the alloy formation in the contacts was investigated in the temperature range 130C-500C and compared with previous studies on contacts without the presence of a barrier. These results were further compared with x-ray analysis of gold/barrier contacts subjected to a standard metallization alloying procedure. The results of the slow temperature ramps (0.4C/min) used for the in situ x-ray analysis provided insight into the long-term stability of the contacts.