Boron sqrt 3 x sqrt 3 Interface Structure on Si(111): Two-Dimensional Ordered Doping Layer

The sqrt 3xsqrt3 reconstruction of boron on Si(111) remains ordered during room temperature deposition of Si, and forms an ordered Si(111)Bsqrt 3x sqrt s /a-Si interface with 1/3 monolayer boron at the interface. In-situ syncrotron x-ray diffraction measurements during growth of the Si(111)B/a-Si interface were used to determine the interface structure. The Si(111)B sqrt 3 surface is transformed to the Si(111)B/a-Si ordered interface via the removal of Si adatoms from the surface which then become part of the amorphous Si layer.