Carbon Dioxide Inhibition of Localized Corrosion of Aluminum Alloys

As part of an effort to elucidate the mechanism by which CO sub 2 gas purging inhibits localized corrosion of sputtered aluminum alloy films, pitting experiments were conducted in aqueous HC1 and HF solutions of various concentrations. The dependence of areal pitting density on chloride and fluoride ion concentration, CO sub 2 and N sub 2 gas purging, and pH was determined.