Chapter 14: Yield and Reliability

Previous chapters discussed the science and technology of VLSI circuit fabrication. This chapter considers two conditions that must be satisfied in order for VLSI to be a useful, growing technology. First, the fabricated circuits must be capable of being produced in large quantities at costs that are competitive with alternate methods of achieving the circuit and systems function. Second, the circuits must be capable of performing their function throughout their intended life. To produce circuits that meet these two requirements we must understand the mechanisms that lead to high cost and unreliable devices. Once these mechanisms are understood and quantified, we can develop the technology required to meet our goals.