Characterization of the Focused Output from a Se Soft-X-Ray Laser.
01 January 1989
The output energy (90microJ), focal spot diameter (235microns) and pointing accuracy (+/-75micro rad) of the Se soft-x-ray laser operating at 20.6 and 20.9 nm are reported. Now that this intense soft-x-ray source has been well characterized it may find use in such diverse applications as lithography, contact microscopy, holography and photoionization pumping.