Charge Distribution in Buried-Channel Charge-Coupled Devices

This paper describes a numerical determination of the distribution of charge in a one-dimensional model of a buried-channel chargecoupled device (CCD). 1 Several calculations have recently been made of the static potential in CCD's in the absence of stored charge. 2 - 4 In addition, the motion of the stored charge under dynamic conditions has been studied by means of essentially one-dimensional models which do not involve a true knowledge of the distribution of stored charge or the charge-carrying capacity of the CCD. 2 , 5 However, so far it has not been possible to calculate even the static stored-charge distribution in a two-dimensional model of a buried-channel CCD, much less to follow the motion of this charge under dynamic conditions. In this paper a start is made on the problem by calculating the static distribution of stored charge in a one-dimensional model of a buried-channel CCD. The resulting information on the charge distribution is of interest in itself. However, an additional important objective has been to find numerical techniques which can be extended to the two-dimensional problem. The paper is divided into three parts. Section I treats the physics of the model and Section I I I gives numerical results. Section II deals briefly with the numerical techniques used and it may be omitted by the reader without loss of continuity. 1009