Comparison of AlGaInAs-based Laser Behavior Grown on Hybrid InP-SiO2/Si and InP Substrates
01 January 2020
In this work, we present the fabrication process of a 3 µm-thick AlGaInAs-based vertical p-i-n laser diode structure grown on a directly bonded InP-SiO2/Si (InPoSi) substrate. High-quality epitaxial growth on InPoSi is reported. Device performance is compared to the ones obtained from the same growth run on an InP substrate as a reference. Based on these structures, the fabrication process of Fabry-Perot broad lasers is presented. High electrical properties of the n and p contacts are demonstrated. Lasing operation in the pulse regime is shown up to 50°C. Threshold current densities as low as 0.4 kA/cm² at 20°C are obtained for the laser on InPoSi, comparable to the ones obtained for the reference on InP substrate.
